推荐星级:
  • 1
  • 2
  • 3
  • 4
  • 5

基于MEMS的电容式传感器信号调理电路设计

更新时间:2020-09-17 05:16:25 大小:1M 上传用户:守着阳光1985查看TA发布的资源 标签:mems电容传感器信号调理 下载积分:2分 评价赚积分 (如何评价?) 收藏 评论(0) 举报

资料介绍

为了提高MEMS(Micro-electro-mechanical Systems)微机电系统电容式传感器测量低电容的灵敏度,提出了一种MEMS电容式传感器调理电路,并采用绝缘硅片(SOI)MEMS电容式加速度传感器组成了完整的电容测量系统。该信号调理电路采用了一组片上电容阵列用以抵消电容结构的失配。并且采用可调的方形波发生器来调谐系统的灵敏性,以此弥补电子装置制成后产生的变化。电路采用0.18-mm CMOS技术设计并制成,测量结果显示,提出的测量系统能够准确测量到MEMS传感器的电容变化以及加速度,证明了信号调理电路的正确性和精确性。

In order to improve the sensitivity of MEMS capacitive sensor to measure low capacitance,a MEMS capaci-tive sensor conditioning circuit was proposed. An integrated capacitance measuring system is made by using an insu-lated silicon wafer(SOI)MEMS capacitive accelerometer. The signal conditioning circuit uses a set of chip capacitor array to offset the loss of the capacitor structure. The sensitivity of the adjustable system of a square wave generator is used to compensate the change of the electronic device. Circuits are designed and made by 0.18-mm CMOS technolo-gy. The experimental results show that the measurement system can accurately measure to the changes in the ...

部分文件列表

文件名 大小
基于MEMS的电容式传感器信号调理电路设计.pdf 1M

全部评论(0)

暂无评论