第 26 卷第 2 期
2018 年 04 月
中国惯性技术学报
Vol.26 No.2
Apr. 2018
Journal of Chinese Inertial Technology
文章编号:1005-6734(2018)02-0275-06
doi: 10.13695/j.cnki.12-1222/o3.2018.02.021
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MEMS 环形谐振陀螺的结构设计与振动特性分析
寇志伟 1,2,3,刘 俊 1,2,曹慧亮 1,2,石云波 1,2,张英杰 1,2
(1. 中北大学 电子测试技术国防科技重点实验室,太原 030051;2. 中北大学 仪器科学与动态测试教育
部重点实验室,太原 030051;3. 内蒙古工业大学,呼和浩特 010051)
摘要:针对环形谐振陀螺谐振结构特性参数相同、检测灵敏度高、温度与抗干扰特性好等特点,提出
了一种新颖的 S 形挠曲支撑梁的电容式环形谐振陀螺。其环形谐振子的刚度系数、固有频率等振动特
性参数是陀螺结构优化、模态控制、驱动与检测电路设计的主要理论参数。为了得到该陀螺精确的谐
振子特性参数,基于角度敏感原理、谐振结构的材料力学性能与机械振动特性,推导了谐振结构的等
效刚度系数与固有频率的理论模型,并且分别进行了有限元仿真分析与样机频率特性测试。结果表明
该理论模型计算的固有频率与有限元分析的误差为 7.0820%,与样机实际测试的误差为 3.9035%,证
明了理论模型的正确性,为该陀螺的进一步研究提供了理论依据。
关
键
词:MEMS;环形谐振陀螺;结极设计;振动特性;固有频率
中图分类号:U666.1 文献标志码:A
Structure design and vibration characteristics analysis of
MEMS vibrating ring gyroscope
KOU Zhiwei1,2,3, LIU Jun1,2, CAO Huiliang1,2, SHI Yunbo1,2, ZHANG Yingjie1,2
(1. Science and Technology on Electronic Test and Measurement Laboratory, North University of China,
Taiyuan 030051, China; 2. Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of
Education, Taiyuan 030051, China; 3. Inner Mongolia University of Technology, Hohhot 010051, China)
A novel capacitive vibrating ring gyroscope with S-shape flexure supporting springs is proposed in
Abstract:
accordance with the characteristics of the ring vibration gyroscope, such as symmetrical resonant structure,
high sensitivity, excellent temperature performance and anti-interference ability. The stiffness coefficient and
natural frequency of ring resonator are necessary parameters for gyroscope structure optimization, mode
control and circuit design. In order to calculate these resonator parameters, a theoretical model of the ring
resonant structure’s equivalent stiffness and natural frequency is derived according to the principle of angle
sensitivity, material properties and mechanical vibration characteristics of the resonant structures. The finite
element analysis simulation and the prototype frequency response test are carried out respectively, and the
results show that the inherent frequency of the theoretical model is 7.0820% difference from that by the finite
element analysis, and is 3.9035% difference from that of the actual test, which proves the correctness of the
theoretical model and provides a theoretical basis for the further study of the gyroscope.
MEMS; vibrating ring gyroscope; structure design; vibration characteristics; natural frequency
Key words:
MEMS 陀螺是应用微机械加工技术与微电子工
氏效应实现驱动和检测振动模态之间的能量转移,已
艺制作的新型固态传感器[1-2],其工作原理是利用哥
成为当前惯性陀螺的重要収展斱向之一[1,3]。MEMS
收稿日期:2017-11-15;修回日期:2018-03-30
基金项目:国家自然科学基金国家重大科研仪器研制项目(51727808);国家自然科学基金资助项目(51705477);山西省回
国留学人员科研资助项目(2016-083);中北大学电子测试技术重点实验室开放基金(ZDSYSJ2015004)
作者简介:寇志伟(1984—),男,博士研究生,从事 MEMS 传感器设计与测试方面的研究。E-mail:
联 系 人:刘俊(1968—),男,教授,博士生导师。E-mail:
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