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调幅式电容位移传感器开关检波电路设计
资料介绍
针对调幅式电容位移传感器乘法器检波存在的速度慢、功耗大和热噪声大问题,设计了一种基于模拟开关的全波检波电路。首先,对开关全波检波和开关半波检波原理进行分析,根据分析结果选择了全波检波方法。在此基础上,完成开关全波检波电路设计与测量系统其它部分设计。最后,利用八位半数字表3458A对检波电路与测量系统性能指标进行测试。测试结果表明:检波电路可以实现0.1 m V的分辨率,测量系统在150~650μm范围内分辨率达30 nm,系统示值稳定性0.1 m V/30 min,电容测量系统最大测量偏差为20 nm。该测量系统满足电容测微系统稳定性好、准确性高的要求。
Aiming at problem of amplitude modulation( AM) capacitive displacement sensor multiplier low detecting speed,large power consumption and big thermal noise,a full-wave detecting circuit based on analog switch is designed. Firstly,analyze principle of switch full-wave detection and switch half-wave detecting,according to analysis result,full-wave detecting method is chosen. On this basis,design of switch full-wave detecting circuit and other parts of measuring system are completed. Finally,by using eight and a half bit digital multimeter 3458 A,performance index of detecting circuit and measurement system are tested. Test results show that detecting circuit can r...
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文件名 | 大小 |
调幅式电容位移传感器开关检波电路设计.pdf | 275K |
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