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基于声表面波微流转换微器件研究

更新时间:2020-09-03 08:57:24 大小:800K 上传用户:songhuahua查看TA发布的资源 标签:压电基片印刷电路板声表面波微流转换 下载积分:5分 评价赚积分 (如何评价?) 打赏 收藏 评论(0) 举报

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提出了压电基片上液滴转换为微通道内微流体的方法。在128°YX-LiNbO3基片上采用微电子工艺制作两叉指换能器,软光刻工艺制作聚二甲基硅氧烷(PDMS)微通道,镂空印刷电路板,内嵌压电子器件和微通道。两叉指换能器激发声表面波控制液滴与带细孔钢针的接触时间,实现一定量的微流转换。当两叉指换能器上电信号切换时间为9.667s,水微流体输运速度为0.365μL/s时,微流转换量为3.525μL。

A method for transforming a droplet on a piezoelectric substrate into microfluid in a microchannel was pres- ented and a microdevice for transforming the droplet was fabricated. The microdevice was comprised of a piezoelectric sub- device with two interdigital transducers on 128° YX-LiNbO3 substrate, a poly(dimethylsiloxane)(PDMS) microchannel em- bedded into a printed circuit board and a steel needle with a small hole. The printed circuit board was hollowed out for em- bedding the piezoelectric sub-device and the PDMS microchannel using hollowed-out technology. Surface acoustic waves ex- cited by the two interdigital transducers on the piezoelectric sub-device were used to control the contact time of the droplet to the steel needle and then ...

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基于声表面波微流转换微器件研究.pdf 800K

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