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集成微电容式传感器检测电路设计与研究
资料介绍
集成电容式传感器的研究中,微电容信号的检测电路是其研究的难点之一。设计一种微电容转换为电压的检测电路,由差分式开关电容电路、反相放大电路、低通滤波电路等组成。基于0.18μm CMOS工艺和Cadence Spectre仿真器对电路进行仿真,结果表明所设计的检测电路能够消除失调电压和偏置电压误差,减少电荷注入和时钟馈通对其影响,有效的实现微电容检测。
Measuring circuit is a difficulty to research on integrated micro-capacitive sensors.A capacitance-voltage measuring circuit is designed,including the differential switched-capacitor circuits,inverting amplifier circuits,low-pass filters and so on.Based on 0.18μm CMOS process,the measuring circuit is simulated by Spectre of Cadence.The results show that the circuit realizes micro-capacitance measuring through removing the effect of the offset and bias voltage,and decreasing the influence of charge injection and clock feed.
部分文件列表
文件名 | 大小 |
集成微电容式传感器检测电路设计与研究.pdf | 515K |
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