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MEMS电容式压力传感器检测电路比较研究
资料介绍
介绍了MEMS电容式压力传感器检测电路的5种实现方式：脉宽调制法、运算放大器法、电荷注入法、调频法和AC运放法.并从稳定性、测量灵敏度及抗杂散性等方面介绍了不同方式下检测电路的优缺点,为MEMS电容式压力传感器提供了参考.
MEMS capacitive pressure sensor has the advantages of low power consumption, good temperaturestability, solid and fast dynamic response. Five kinds of detection circuit for MEMS capacitive pressure sensor areintroduced, which are based on PWM, operational amplifiers,These detection circuits are compared in stability, sensitivity ofaspects, and their advantages and disadvantages are concludeddetection circuit for MEMS capacitive pressure sensor.charge injection, FM and AC amplifier respectively.measurements, resistance to spurious and some other This paper provides useful references to designer ofdetection circuit for MEMS capacitive pressure sensor.
部分文件列表
| 文件名 | 大小 |
| MEMS电容式压力传感器检测电路比较研究.pdf | 282K |
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