一种跨阻式微电容信号检测电路的设计与测试

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针对微电容超声波换能器的信号检测,设计了一种跨阻放大检测电路,并对其检测原理进行了分析;建立了跨阻放大检测电路运算放大器的噪声模型,并对其进行了理论分析,最终给出了测量电路噪声峰峰值的计算公式。通过模拟测试得到了电路的实际最小分辨率为10×10-10A,电路的输出线性度为5.3%。通过对微电容超声波换能器收发系统的水下测试可知,该跨阻放大检测电路测量误差为2.3%,能够精确地测量换能器与障碍物的实时距离,为换能器在超声成像系统中的应用奠定了基础。

Aiming at the signal detection of micro-fabricated capacitance ultrasonic transducer（ CMUT）,a transimpedance amplifier measuring circuit is designed in the paper and its detection principle is analyzed. In this paper,the noise model of amplifier is established and analyzed. Finally,the calculation formula of electrical noise peak-to-peak is given. Through the simulation test,it obtains the actual minimum resolution of 10 × 10- 10 A,and the output linearity is 5. 3%. The system test under water is conducted,which demonstrates that the circuit could measure the distance exactly between CMUT and barrier sensitively,the measurement error is2. 3%. it constitutes a solid basis for the application of CMUT in ultrasonic im...