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Sentaurus TCAD器件工艺模拟教程
资料介绍
Sentaurus是Synopsys公司的专门用于半导体器件制造工艺和电学特性仿真的EDA软件,可以给出掺杂、电势分布等物理特性。
部分文件列表
文件名 | 大小 |
sentaurus中文教程.pdf | 3M |
部分页面预览
(完整内容请下载后查看)Sentaurus TCAD 2007.03 培训(XXXX 计算机学院 XX 组)
目录
Sentaurus TCAD 培训.......................................................................................................................................... 1
工具简介..............................................................................................................................................................2
A.TCAD 是什么?(10 分钟)
2
.................................................................................................................
A.1 TCAD 与半导体工业...................................................................................................................... 2
A.2 工艺模拟.......................................................................................................................................2
A.3 器件模拟
2
.......................................................................................................................................
B.TCAD 包含哪些工具?(20 分钟)......................................................................................................3
B.1 Sentaurus Workbench
3
....................................................................................................................
B.2 Ligament......................................................................................................................................... 4
B.3 Sentaurus Process...........................................................................................................................4
B.4 Sentaurus Structure Editor(SDE)............................................................................................... 5
B.5 Mesh and Noffset3D.......................................................................................................................5
B.6 Sentaurus Device............................................................................................................................ 6
B.7 Tecplot SV
6
.......................................................................................................................................
B.8 Inspect............................................................................................................................................ 7
B.9 Calibration Kit................................................................................................................................. 7
SWB
8
8
......................................................................................................................................................................
A. Getting Started(15 分钟)
....................................................................................................................
A.1 概述...............................................................................................................................................8
A.2 启动 SWB...................................................................................................................................... 8
B. 运行工程(30 分钟)
9
............................................................................................................................
B.1 加载 SWB 工程..............................................................................................................................9
B.2 改变树的显示属性..................................................................................................................... 10
B.3 清空工程目录
10
.............................................................................................................................
B.4 运行工程.....................................................................................................................................10
B.5 查看输出结果.............................................................................................................................11
C. 创建工程(30 分钟)
11
..........................................................................................................................
C.1 设置工具流.................................................................................................................................11
D. 组装多个实验(30 分钟)..................................................................................................................12
D.1 添加参数
12
.....................................................................................................................................
D.2 设置多个实验.............................................................................................................................13
D.4 创建方案.....................................................................................................................................14
D.5 裁剪工程树
15
.................................................................................................................................
D.6 添加变量.....................................................................................................................................15
16
Ligament
.............................................................................................................................................................
A. Getting Started 10 min....................................................................................................................... 16
A.1 简介.............................................................................................................................................16
A.2 Ligament 流程编辑器.................................................................................................................. 16
A.3 Ligament 版图编辑器
16
..................................................................................................................
A.4 Ligament Translator......................................................................................................................16
B. Ligament 流程编辑器 30 min............................................................................................................... 16
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2021-05-26 09:17:16hhhsaladin
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